Szukana fraza: [Opis = "The aim of this work was to study the possibilities of developing mechanical sensors with poly\-Si piezoresistors on insulating substrate for operation in different temperature ranges \(low, elevated and high temperatures\). Laser recrystallization is used as a technological tool to adjust the electrical and piezoresistive parameters of the polysilicon layer.For this purpose a set of studies including numerical simulation and experimental work has been carried out. The main three directions of the studies are considered\: problems of thermal stabilization of the pressure sensor performance at elevated and high temperatures\; problem of sensor operation at cryogenic temperatures\; development of a multifunctional pressure\-temperature sensor."]

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