Search for: [Description = "The design, fabrication and measurement of a con\- tinuously tunable RF MEMS capacitor is described. The capacitor’s dual gap height architecture allows for electro\- static tuning with low resistive loss and a large tuning range. A new dual tuning scheme is introduced for use with two voltage sources. This dual tuning, coupled with a stress\-induced bridge, is used to reach further device tuning. Measurements indicate a continuously tunable capacitance range of 6.2\:1 with a quality factor over 50 at 30 GHz for 310 fF."]

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