Search for: [Description = "We study for the first time errors in on\-wafer scattering parameter measurements caused by the parasitic microstrip\-like mode propagation in conductor\-backed coplanar waveguide \(CB\-CPW\). We determine upper bound for these errors for typical CPW devices such as a matched load, an open circuit, and a transmission line section. To this end, we develop an electromagnetic\-simulations\-based multimode three\-port model for the transition between an air\-coplanar probe and the CB\-CPW. Subsequently, we apply this model to examine errors in the device S parameters de\-embedded from measurements affected by the parasitic MSL mode. Our analysis demonstrates that the multimode propagation in CB\-CPW may significantly deteriorate the S\-parameters measured on wafer."]

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