@misc{Jakubowski_Andrzej_Characterization, author={Jakubowski, Andrzej and Tomaszewski, Daniel and Łukasiak, Lidia and Gibki, Jan and Ratajczak, Jacek and Kątcki, Jerzy}, howpublished={online}, publisher={Instytut Łączności - Państwowy Instytut Badawczy, Warszawa}, language={ang}, title={Characterization of SOI fabrication process using gated-diode measurements and TEM studies, Journal of Telecommunications and Information Technology, 2000, nr 3,4}, type={artykuł}, keywords={characterization, microelectronics, SOI technology}, }