@misc{Ashburn_Peter_Properties,
 author={Ashburn, Peter and Mubarek El, Huda A. W.},
 howpublished={online},
 publisher={Instytut Łączności - Państwowy Instytut Badawczy, Warszawa},
 language={ang},
 title={Properties and benefits of fluorine in silicon and silicon-germanium devices, Journal of Telecommunications and Information Technology, 2007, nr 2},
 type={artykuł},
 keywords={passivation of interface states, boron diffusion, bipolar transistor, fluorine, polysilicon emitter},
}