@misc{Schwalke_Udo_Evaluation, author={Schwalke, Udo and Zaunert, Florian and Endres, Ralf and Stefanov, Yordan}, howpublished={online}, publisher={Instytut Łączności - Państwowy Instytut Badawczy, Warszawa}, language={ang}, title={Evaluation of MOSFETs with crystalline high-k gate-dielectrics: device simulation and experimental data, Journal of Telecommunications and Information Technology, 2007, nr 2}, type={artykuł}, keywords={MEDICI, gadolinium oxide, praseodymium oxide, crystalline high-k gate dielectric, remote coulomb scattering, TSUPREM4, interface state density, carrier mobility, CMP, CMOS process, damascene metal gate, rare-earth oxide}, }