@misc{Beck_Romuald_B._Oxidation,
 author={Beck, Romuald B. and Grabowski, Jarosław},
 howpublished={online},
 publisher={Instytut Łączności - Państwowy Instytut Badawczy, Warszawa},
 language={ang},
 title={Oxidation kinetic sof silicon strained by silicon germanium, Journal of Telecommunications and Information Technology, 2007, nr 3},
 type={artykuł},
 keywords={silicon germanium, modeling, kinetics, oxidation, silicon},
}