@misc{Szmidt_Jan_Influence,
 author={Szmidt, Jan and Werbowy, Aleksander and Kwietniewski, Norbert and Firek, Piotr},
 howpublished={online},
 publisher={Instytut Łączności - Państwowy Instytut Badawczy, Warszawa},
 language={ang},
 title={Influence of the deposition process parameters on electronic properties of BN films obtained by means of RF PACVD, Journal of Telecommunications and Information Technology, 2007, nr 3},
 type={artykuł},
 keywords={thin BN films, III-nitrides, electronic properties, RF PACVD},
}