@misc{Rzodkiewicz_Witold_Ellipsometric,
 author={Rzodkiewicz, Witold and Panas, Andrzej},
 howpublished={online},
 publisher={Instytut Łączności - Państwowy Instytut Badawczy, Warszawa},
 language={ang},
 title={Ellipsometric spectroscopy studies of compaction and decompaction of Si-SiO2 systems, Journal of Telecommunications and Information Technology, 2007, nr 3},
 type={artykuł},
 keywords={spectroscopic ellipsometry, Si-SiO2 system, refractive index, density},
}