@misc{Tardif_Francois_Understanding,
 author={Tardif, Francois and Danel, Adrien and Raccurt, Olivier},
 howpublished={online},
 publisher={Instytut Łączności - Państwowy Instytut Badawczy, Warszawa},
 language={ang},
 title={Understanding of wet and alternative particle removal processes in microelectronics: theoretical capabilities and limitations, Journal of Telecommunications and Information Technology, 2005, nr 1},
 type={artykuł},
 keywords={particle removal, cleaning, SC1},
}