@misc{Szmidt_Jan_Properties,
 author={Szmidt, Jan and Werbowy, Aleksander and Firek, Piotr and Olszyna, Andrzej R.},
 howpublished={online},
 publisher={Instytut Łączności - Państwowy Instytut Badawczy, Warszawa},
 language={ang},
 title={Properties of Al contacts to Si surface exposed in the course of plasma etching of previously grown nanocrystalline c-BN lm, Journal of Telecommunications and Information Technology, 2005, nr 1},
 type={artykuł},
 keywords={electric contacts, cubic boron nitride, plasma etching},
}