@misc{Jakubowski_Andrzej_Analysis,
 author={Jakubowski, Andrzej and Tomaszewski, Daniel and Łukasiak, Lidia and Korwin-Pawlowski, Michael L. and Malinowski, Arkadiusz and Sekine, Makoto and Hori, Masaru},
 howpublished={online},
 publisher={Instytut Łączności - Państwowy Instytut Badawczy, Warszawa},
 language={ang},
 title={Analysis of the Dispersion of Electrical Parameters and Characteristics of FinFET Devices, Journal of Telecommunications and Information Technology, 2009, nr 4},
 type={artykuł},
 keywords={plasma etching, FinFET, line edge roughness, parameter variability, plasma etching, technology computer aided design (TCAD), parameter variability, technology computer aided design (TCAD), line edge roughness},
}