@misc{Szmidt_Jan_Technology,
 author={Szmidt, Jan and Firek, Piotr},
 howpublished={online},
 publisher={Instytut Łączności - Państwowy Instytut Badawczy, Warszawa},
 language={ang},
 title={Technology of MISFET with SiO2/BaTiO3 System as a Gate Insulator, Journal of Telecommunications and Information Technology, 2009, nr 4},
 type={artykuł},
 keywords={radio frequency plasma sputtering, MISFET structures, I–V characteristics, barium titanate},
}