@misc{Jakubowski_Andrzej_Piezoresistive,
 author={Jakubowski, Andrzej and Tomaszewski, Daniel and Grabiec, Piotr and Rangelow, Ivo W. and Domański, Krzysztof and Barth, Wolfgang and Dębski, Tomasz},
 howpublished={online},
 publisher={Instytut Łączności - Państwowy Instytut Badawczy, Warszawa},
 language={ang},
 title={Piezoresistive sensors for atomic force microscopy – numerical simulations by means of virtual wafer fab, Journal of Telecommunications and Information Technology, 2001, nr 1},
 type={artykuł},
 keywords={technology characterization, technology simulation, atomic force microscopy, piezoresistive sensors},
}