@misc{Druzhinin_Anatoly_Grain,
 author={Druzhinin, Anatoly and Pankov, Yury},
 howpublished={online},
 publisher={Instytut Łączności - Państwowy Instytut Badawczy, Warszawa},
 language={ang},
 title={Grain boundary effect on the anisotropy piezoresistance of laser-recrystallized polysilicon layers in SOI-structures, Journal of Telecommunications and Information Technology, 2001, nr 1},
 type={artykuł},
 keywords={SOI, MLR, polysilicon layers},
}