@misc{Ruzyllo_Jerzy_Semiconductor,
 author={Ruzyllo, Jerzy},
 howpublished={online},
 publisher={Instytut Łączności - Państwowy Instytut Badawczy, Warszawa},
 language={ang},
 type={artykuł},
 title={Semiconductor cleaning technology for next generation material systems, Journal of Telecommunications and Information Technology, 2007, nr 2},
 keywords={III-V compounds, FinFET, IC manufacturing, MEMS, MOS gate stack, semiconductor cleaning, semiconductor cleaning, IC manufacturing, MEMS, MOS gate stack, FinFET},
}