Title:

Investigations of electron emission from DLC thin films deposited by means of RF PCVD at various self-bias voltages, Journal of Telecommunications and Information Technology, 2007, nr 3

Creator:

Znamirowski, Zbigniew ; Staryga, Elżbieta ; Jarzyńska, Dagmara ; Cłapa, Marian

Subject and Keywords:

RF PCVD ; DLC ; effective work function ; electron emission ; Raman spectroscopy ; turn-on field

Description:

The aim of this paper is to report the results of field emission experiments on undoped, flat diamond-like carbon (DLC) thin films deposited at various self-bias voltages using radio frequency plasma chemical vapor deposition (RF PCVD) technique. It has been observed that the emission properties improve when the absolute value of self-bias voltage becomes higher, e.g., the turn-on field value decreases. The correlation between electron field emission and sp2 content in these films showed improvement of electron emission properties of DLC films for higher amount of sp2 phase.

Publisher:

Instytut Łączności - Państwowy Instytut Badawczy, Warszawa

Date:

2007, nr 3

Resource Type:

artykuł

Format:

application/pdf

DOI:

10.26636/jtit.2007.3.827

ISSN:

1509-4553

eISSN:

1899-8852

Source:

Journal of Telecommunications and Information Technology

Language:

ang

Rights Management:

Biblioteka Naukowa Instytutu Łączności