Title:

Performance and operation of stressed dual gap RF MEMS varactors, Journal of Telecommunications and Information Technology, 2007, nr 1

Creator:

Okoniewski, Michal ; McFeetors, Greg

Subject and Keywords:

varactors ; Q facto ; electromechanical systems (MEMS) ; capacitors

Description:

The design, fabrication and measurement of a con- tinuously tunable RF MEMS capacitor is described. The capacitor’s dual gap height architecture allows for electro- static tuning with low resistive loss and a large tuning range. A new dual tuning scheme is introduced for use with two voltage sources. This dual tuning, coupled with a stress-induced bridge, is used to reach further device tuning. Measurements indicate a continuously tunable capacitance range of 6.2:1 with a quality factor over 50 at 30 GHz for 310 fF.

Publisher:

Instytut Łączności - Państwowy Instytut Badawczy, Warszawa

Date:

2007, nr 1

Resource Type:

artykuł

Format:

application/pdf

DOI:

10.26636/jtit.2007.1.736

ISSN:

1509-4553

eISSN:

1899-8852

Source:

Journal of Telecommunications and Information Technology

Language:

ang

Rights Management:

Biblioteka Naukowa Instytutu Łączności