high-k dielectrics ; CMOS ; Pr2O3 ; wet chemical cleaning ; RIE ; process integration ; wet chemical etching ; resist removal
Description: Publisher:Instytut Łączności - Państwowy Instytut Badawczy, Warszawa
Date: Resource Type: Format: DOI: ISSN: eISSN: Source:Journal of Telecommunications and Information Technology
Language: Rights Management: