Title:

TSSOI as an efficient tool for diagnostics of SOI technology in Institute of Electron Technology, Journal of Telecommunications and Information Technology, 2005, nr 1

Creator:

Tomaszewski, Daniel ; Jaroszewicz, Bohdan ; Grabiec, Piotr ; Marczewski, Jacek ; Barański, Mateusz ; Domański, Krzysztof ; Kucharski, Krzysztof ; Kucewicz, Wojciech ; Grodner, Mirosław ; Sapor, Maria ; Kociubiński, Andrzej ; Niemiec, Halina

Subject and Keywords:

test structure ; SOI CMOS technology ; pixel detector

Description:

This paper reports a test structure for characterization of a new technology combining a standard CMOS process with pixel detector manufacturing technique. These processes are combined on a single thick-_lm SOI wafer. Preliminary results of the measurements performed on both MOS SOI transistors and dedicated SOI test structures are described in detail.

Publisher:

Instytut Łączności - Państwowy Instytut Badawczy, Warszawa

Date:

2005, nr 1

Resource Type:

artykuł

Format:

application/pdf

DOI:

10.26636/jtit.2005.1.287

ISSN:

1509-4553

eISSN:

1899-8852

Source:

Journal of Telecommunications and Information Technology

Language:

ang

Rights Management:

Biblioteka Naukowa Instytutu Łączności