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Title: Performance and operation of stressed dual gap RF MEMS varactors, Journal of Telecommunications and Information Technology, 2007, nr 1

Creator:

Okoniewski, Michal ; McFeetors, Greg

Date:

2007, nr 1

Resource Type:

artykuł

Description:

The design, fabrication and measurement of a con- tinuously tunable RF MEMS capacitor is described. The capacitor’s dual gap height architecture allows for electro- static tuning with low resistive loss and a large tuning range. A new dual tuning scheme is introduced for use with two voltage sources. This dual tuning, coupled with a stress-induced bridge, is used to reach further device tuning. Measurements indicate a continuously tunable capacitance range of 6.2:1 with a quality factor over 50 at 30 GHz for 310 fF.

Publisher:

Instytut Łączności - Państwowy Instytut Badawczy, Warszawa

Format:

application/pdf

Resource Identifier:

oai:bc.itl.waw.pl:229

DOI:

10.26636/jtit.2007.1.736

ISSN:

1509-4553

eISSN:

1899-8852

Source:

Journal of Telecommunications and Information Technology

Language:

ang

Rights Management:

Biblioteka Naukowa Instytutu Łączności

Subject and keywords:

varactors Q facto electromechanical systems (MEMS) capacitors

Object collections:

Last modified:

Jun 25, 2024

In our library since:

Jan 7, 2010

Number of object content hits:

473

All available object's versions:

https://bc.itl.waw.pl/publication/263

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Edition name Date
McFeetors, Greg; Okoniewski, Michal, Performance and operation of stressed dual gap RF MEMS varactors, Journal of Telecommunications and Information Technology, 2007, nr 1 Jun 25, 2024

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Instytut Łączności – Państwowy Instytut Badawczy ul. Szachowa 1 04-894 Warszawa

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(+48) 5128 696

E-Mail

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