Title:

Diagnostics of micro- and nanostructure using the scanning probe microscopy, Journal of Telecommunications and Information Technology, 2005, nr 1

Creator:

Grabiec, Piotr ; Czarnecki, Piotr ; Janus, Paweł ; Gotszalk, Teodor ; Rangelow, Ivo W. ; Radojewski, Jacek ; Szeloch, Roman F. ; Marendziak, Andrzej

Subject and Keywords:

nanofabrication ; scannig probe microscopy ; microsystem

Description:

In this paper we summarize the results of our research concerning the diagnostics of micro- and nanostructure with scanning probe microscopy (SPM). We describe the experiments performed with one of the scanning probe microscopy techniques enabling also insulating surfaces to be investigated, i.e., atomic force microscopy (AFM). We present the results of topography measurements using both contact and non-contact AFM modes, investigations of the friction forces that appear between the microtip and the surface, and experiments connected with the thermal behaviour of integrated circuits, carried out with the local resolution of 20 nm.

Publisher:

Instytut Łączności - Państwowy Instytut Badawczy, Warszawa

Date:

2005, nr 1

Resource Type:

artykuł

Format:

application/pdf

DOI:

10.26636/jtit.2005.1.293

ISSN:

1509-4553

eISSN:

1899-8852

Source:

Journal of Telecommunications and Information Technology

Language:

ang

Rights Management:

Biblioteka Naukowa Instytutu Łączności