Schwalke, Udo ; Zaunert, Florian ; Endres, Ralf ; Stefanov, Yordan
Subject and Keywords:MEDICI ; gadolinium oxide ; praseodymium oxide ; crystalline high-k gate dielectric ; remote coulomb scattering ; TSUPREM4 ; interface state density ; carrier mobility ; CMP ; CMOS process ; damascene metal gate ; rare-earth oxide
Description: Publisher:Instytut Łączności - Państwowy Instytut Badawczy, Warszawa
Date: Resource Type: Format: DOI: ISSN: eISSN: Source:Journal of Telecommunications and Information Technology
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