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Title: Analysis of the Dispersion of Electrical Parameters and Characteristics of FinFET Devices, Journal of Telecommunications and Information Technology, 2009, nr 4

Creator:

Jakubowski, Andrzej ; Tomaszewski, Daniel ; Łukasiak, Lidia ; Korwin-Pawlowski, Michael L. ; Malinowski, Arkadiusz ; Sekine, Makoto ; Hori, Masaru

Date:

2009, nr 4

Resource Type:

artykuł

Description:

Extensive numerical simulations of FinFET structures have been carried out using commercial TCAD tools. A series of plasma etching steps has been simulated for different process conditions in order to evaluate the influence of plasma pressure, composition and powering on the FinFET topography. Next, the most important geometric parameters of the FinFETs have been varied and the electrical characteristics have been calculated in order to evaluate the sensitivity of the FinFET electrical parameters on possible FinFET structure variability.

Publisher:

Instytut Łączności - Państwowy Instytut Badawczy, Warszawa

Format:

application/pdf

Resource Identifier:

ISSN 1509-4553, on-line: ISSN 1899-8852 ; oai:bc.itl.waw.pl:472

Source:

Journal of Telecommunications and Information Technology

Language:

ang

Rights Management:

Biblioteka Naukowa Instytutu Łączności

Subject and keywords:

plasma etching FinFET, line edge roughness, parameter variability, plasma etching, technology computer aided design (TCAD) parameter variability technology computer aided design (TCAD) line edge roughness

Object collections:

Last modified:

Jun 1, 2015

In our library since:

Mar 8, 2010

Number of object content hits:

299

All available object's versions:

https://bc.itl.waw.pl/publication/530

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Edition name Date
Malinowski, Arkadiusz; Tomaszewski, Daniel; Łukasiak, Lidia; Jakubowski, Andrzej; Sekine, Makoto; Hori, Masaru, Analysis of the Dispersion of Electrical Parameters and Characteristics of FinFET Devices, Journal of Telecommunications and Information Technology, 2009, nr 4 Jun 1, 2015

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Instytut Łączności – Państwowy Instytut Badawczy ul. Szachowa 1 04-894 Warszawa

Phone

(+48) 5128 696

E-Mail

biblioteka@il-pib.pl

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